Apparatus and method for inspecting a surface of a sample

P Kruit (Inventor)

    Research output: Patent

    Original languageEnglish
    Patent number2009696
    IPCOCT-12-048
    Priority date29/04/14
    Publication statusPublished - 2014

    Bibliographical note

    Patent: OCT-12-048
    Applicant: TU Delft

    Keywords

    • Geen VSNU-classificatie

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