Apparatus for generating a plurality of beamlets

P Kruit (Inventor)

    Research output: Patent

    Original languageUndefined/Unknown
    Patent numberUS 7,129,502
    IPCaanvrager: Mapper Lithography IP B.V.
    Priority date31/10/06
    Publication statusPublished - 2006

    Keywords

    • other publications
    • Octrooi

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