Apparatus for generating a plurality of beamlets

P Kruit (Inventor)

    Research output: Patent

    Original languageUndefined/Unknown
    Patent numberUS 7,569,833 B2
    IPCAanvrager: Mapper Lithography IP B.V.
    Priority date4/08/09
    Publication statusPublished - 2009

    Bibliographical note

    Aanvrager: Mapper Lithography IP B.V.

    Keywords

    • Octrooi

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