Apparatus for generating a plurality of beamlets ¿ Aligned aperture lens

P Kruit (Inventor)

Research output: Patent

Original language	Undefined/Unknown
Patent number	US 7,365,338
IPC	aangevraagd door Mapper Lithography IP B.V. Delft
Priority date	29/04/08
Publication status	Published - 2008

aangevraagd door Mapper Lithography IP B.V. Delft

Keywords

@misc{7f1698e96fc8405c806f5462177489cc,

title = "Apparatus for generating a plurality of beamlets ¿ Aligned aperture lens",

keywords = "Octrooi",

author = "P Kruit",

note = "aangevraagd door Mapper Lithography IP B.V. Delft; US 7,365,338; aangevraagd door Mapper Lithography IP B.V. Delft",

year = "2008",

language = "Undefined/Unknown",

type = "Patent",

}