Apparatus for generating a plurality of beamlets ¿ Aligned aperture lens

P Kruit (Inventor)

    Research output: Patent

    Original languageUndefined/Unknown
    Patent numberUS 7,365,338
    IPCaangevraagd door Mapper Lithography IP B.V. Delft
    Priority date29/04/08
    Publication statusPublished - 2008

    Keywords

    • Octrooi

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