Application of excimer laser annealing in the formation of implanted shallow junctions

LK Nanver, EJG Goudena, Q Ren, MR van den Berg, RJM Mallee, JHCM Slabbekoorn

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientific

Original languageUndefined/Unknown
Title of host publicationProceedings
Place of PublicationNew Jersey
PublisherThe Electrochemical Society
Number of pages8
ISBN (Print)1-56677-232-X
Publication statusPublished - 1999

Publication series

Publisherthe Electrochemical Society


  • ZX Int.klas.verslagjaar < 2002

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