Application of excimer laser annealing in the formation of implanted shallow junctions

LK Nanver, EJG Goudena, Q Ren, MR van den Berg, RJM Mallee, JHCM Slabbekoorn

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific

Original language	Undefined/Unknown
Title of host publication	Proceedings
Place of Publication	New Jersey
Publisher	The Electrochemical Society
Pages	171-178
Number of pages	8
ISBN (Print)	1-56677-232-X
Publication status	Published - 1999

Name
Publisher	the Electrochemical Society

Keywords

@inproceedings{e957f715d1de4df4bc715e04aee9f057,

title = "Application of excimer laser annealing in the formation of implanted shallow junctions",

keywords = "ZX Int.klas.verslagjaar < 2002",

author = "LK Nanver and EJG Goudena and Q Ren and {van den Berg}, MR and RJM Mallee and JHCM Slabbekoorn",

year = "1999",

language = "Undefined/Unknown",

isbn = "1-56677-232-X",

publisher = "The Electrochemical Society",

pages = "171--178",

booktitle = "Proceedings",

}

TY - GEN

T1 - Application of excimer laser annealing in the formation of implanted shallow junctions

AU - Nanver, LK

AU - Goudena, EJG

AU - Ren, Q

AU - van den Berg, MR

AU - Mallee, RJM

AU - Slabbekoorn, JHCM

PY - 1999

Y1 - 1999

KW - ZX Int.klas.verslagjaar < 2002

M3 - Conference contribution

SN - 1-56677-232-X

SP - 171

EP - 178

BT - Proceedings

PB - The Electrochemical Society

CY - New Jersey

ER -