Application of Laser Annealing in the EU FP6 Project D-DotFET

LK Nanver, V Jovanovic, C Biasotto, J van der Cingel

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

1 Citation (Scopus)
Original languageUndefined/Unknown
Title of host publicationProceedings 17th IEEE International Conference on Advanced Thermal Processing of Semiconductors (RTP 2009)
Editors s.n.
Place of PublicationLos Alamitos, USA
PublisherIEEE
Pages1-7
Number of pages7
ISBN (Print)978-1-4244-3815-0
DOIs
Publication statusPublished - 2009
Event17th IEEE International Conference on Advanced Thermal Processing of Semiconductors (RTP 2009), Albany, NY, USA - Los Alamitos, USA
Duration: 29 Sept 20092 Oct 2009

Publication series

Name
PublisherIEEE

Conference

Conference17th IEEE International Conference on Advanced Thermal Processing of Semiconductors (RTP 2009), Albany, NY, USA
Period29/09/092/10/09

Bibliographical note

ISSN: 1944-026X, IEEE Catalog Number: CFP09TPS-CDR

Keywords

  • Conf.proc. > 3 pag

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