@inproceedings{c72624552b1547039ee56871f6af08fa,
title = "Application of Laser Annealing in the EU FP6 Project D-DotFET",
keywords = "Conf.proc. > 3 pag",
author = "LK Nanver and V Jovanovic and C Biasotto and {van der Cingel}, J",
note = "ISSN: 1944-026X, IEEE Catalog Number: CFP09TPS-CDR; 17th IEEE International Conference on Advanced Thermal Processing of Semiconductors (RTP 2009), Albany, NY, USA ; Conference date: 29-09-2009 Through 02-10-2009",
year = "2009",
doi = "10.1109/RTP.2009.5373443",
language = "Undefined/Unknown",
isbn = "978-1-4244-3815-0",
publisher = "IEEE",
pages = "1--7",
editor = "s.n.",
booktitle = "Proceedings 17th IEEE International Conference on Advanced Thermal Processing of Semiconductors (RTP 2009)",
address = "United States",
}