Application of set membership identification for fault detection of MEMS

Vasso Reppa; Anthony Tzes

doi:10.1109/ROBOT.2006.1641783

Application of set membership identification for fault detection of MEMS

^*Corresponding author for this work

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

10 Citations (Scopus)

Abstract

In this article, a set membership (SM) identification technique is tailored to detect faults in micro-electromechanical systems. The SM-identifier estimates an orthotope which contains the system's parameter vector. Based on this orthotope, the system's output interval is predicted. If the actual output is outside of this interval, then a fault is detected. Utilization of this scheme can discriminate mechanical-component faults from electronic component variations frequently encountered in MEMS. For testing the suggested algorithm's performance in simulation studies, an interface between classical control-software (MATLAB) and circuit emulation (HSPICE) is developed.

Original language	English
Title of host publication	Proceedings 2006 IEEE International Conference on Robotics and Automation, ICRA 2006
Pages	643-648
DOIs	https://doi.org/10.1109/ROBOT.2006.1641783
Publication status	Published - 2006
Externally published	Yes
Event	2006 IEEE International Conference on Robotics and Automation, ICRA 2006 - Orlando, FL, United States Duration: 15 May 2006 → 19 May 2006

Conference

Conference	2006 IEEE International Conference on Robotics and Automation, ICRA 2006
Country/Territory	United States
City	Orlando, FL
Period	15/05/06 → 19/05/06

Keywords

Fault detection
MEMS
Set membership identification

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10.1109/ROBOT.2006.1641783

Cite this

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title = "Application of set membership identification for fault detection of MEMS",

abstract = "In this article, a set membership (SM) identification technique is tailored to detect faults in micro-electromechanical systems. The SM-identifier estimates an orthotope which contains the system's parameter vector. Based on this orthotope, the system's output interval is predicted. If the actual output is outside of this interval, then a fault is detected. Utilization of this scheme can discriminate mechanical-component faults from electronic component variations frequently encountered in MEMS. For testing the suggested algorithm's performance in simulation studies, an interface between classical control-software (MATLAB) and circuit emulation (HSPICE) is developed.",

keywords = "Fault detection, MEMS, Set membership identification",

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doi = "10.1109/ROBOT.2006.1641783",

language = "English",

isbn = "9780780395060",

pages = "643--648",

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AU - Reppa, Vasso

AU - Tzes, Anthony

PY - 2006

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N2 - In this article, a set membership (SM) identification technique is tailored to detect faults in micro-electromechanical systems. The SM-identifier estimates an orthotope which contains the system's parameter vector. Based on this orthotope, the system's output interval is predicted. If the actual output is outside of this interval, then a fault is detected. Utilization of this scheme can discriminate mechanical-component faults from electronic component variations frequently encountered in MEMS. For testing the suggested algorithm's performance in simulation studies, an interface between classical control-software (MATLAB) and circuit emulation (HSPICE) is developed.

AB - In this article, a set membership (SM) identification technique is tailored to detect faults in micro-electromechanical systems. The SM-identifier estimates an orthotope which contains the system's parameter vector. Based on this orthotope, the system's output interval is predicted. If the actual output is outside of this interval, then a fault is detected. Utilization of this scheme can discriminate mechanical-component faults from electronic component variations frequently encountered in MEMS. For testing the suggested algorithm's performance in simulation studies, an interface between classical control-software (MATLAB) and circuit emulation (HSPICE) is developed.

KW - Fault detection

KW - MEMS

KW - Set membership identification

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U2 - 10.1109/ROBOT.2006.1641783

DO - 10.1109/ROBOT.2006.1641783

M3 - Conference contribution

AN - SCOPUS:33845643190

SN - 9780780395060

SP - 643

EP - 648

BT - Proceedings 2006 IEEE International Conference on Robotics and Automation, ICRA 2006

T2 - 2006 IEEE International Conference on Robotics and Automation, ICRA 2006

Y2 - 15 May 2006 through 19 May 2006

ER -

Application of set membership identification for fault detection of MEMS

Abstract

Conference

Keywords

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