@inproceedings{60a67d6ea9504234b097dc1d9db49090,
title = "Application of spacer hard-masks for sub-100 nm wide silicon fin-etching",
keywords = "conference contrib. refereed, Conf.proc. > 3 pag",
author = "V Jovanovic and S Milosavljevic and LK Nanver and T Suligoj",
year = "2006",
language = "Undefined/Unknown",
isbn = "90-73461-44-8",
publisher = "s.l.",
pages = "519--522",
editor = "s.n.",
booktitle = "Proceedings of 9th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors",
note = "9th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors ; Conference date: 23-11-2006 Through 24-11-2006",
}