Arbitrary optical surfaces anisotropically etched in silicon in a single-mask process

DW de Lima Monteiro, GV Vdovin, O Akhzar-Mehr

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientific

Original languageUndefined/Unknown
Title of host publicationMME 2003 14th Micromechanics Europe workshop
Editors s.n.
Place of Publications.l.
Publishers.n.
Pages135-138
Number of pages4
ISBN (Print)90-808266-1-8
Publication statusPublished - 2003
Event14th Micromechanics Europe workshop, Delft, The Netherlands - s.l.
Duration: 2 Nov 20034 Nov 2003

Publication series

Name
Publishers.n.

Conference

Conference14th Micromechanics Europe workshop, Delft, The Netherlands
Period2/11/034/11/03

Keywords

  • Conf.proc. > 3 pag

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