Arrangement and method for transporting radicals

Pieter Kruit (Inventor)

    Research output: Patent

    Original languageEnglish
    Patent numberUS 9123507 B2
    IPCB08B; H05H; H01L; B82Y; G03F; H01J; F15D
    Priority date20/03/12
    Publication statusPublished - 2015

    Cite this

    Kruit, P. (2015). IPC No. B08B; H05H; H01L; B82Y; G03F; H01J; F15D. Arrangement and method for transporting radicals. (Patent No. US 9123507 B2).