Arrangement and method for transporting radicals

Pieter Kruit (Inventor)

    Research output: Patent

    Original languageEnglish
    Patent numberUS 9123507 B2
    IPCB08B; H05H; H01L; B82Y; G03F; H01J; F15D
    Priority date20/03/12
    Publication statusPublished - 2015

    Bibliographical note

    Applicant:TU Delft, MAPPER Lithography B.V., MAPPER LITHOGRAPHY IP B.V

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