Arrays of spherical micromirrors and molded microlenses fabricated with bulk Si micromachining

GV Vdovin; O Akhzar-Mehr; PM Sarro; DW de Lima Monteiro; M Loktev

Arrays of spherical micromirrors and molded microlenses fabricated with bulk Si micromachining

GV Vdovin, O Akhzar-Mehr, PM Sarro, DW de Lima Monteiro, M Loktev

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

Original language	Undefined/Unknown
Title of host publication	Proceedings of SPIE; MEMS/MOENS: advances in photnic communications, sensing, metrology, packaging, and assembly
Editors	UF Behringer, B Courtois, AM Khounsary, DG Uttamchandani
Place of Publication	Bellingham
Publisher	The International Society for Optical Engineering
Pages	107-111
Number of pages	5
ISBN (Print)	0-8194-4740-4
Publication status	Published - 2003
Event	MEMS/MOEMS: advances in photonic communications, sensing, metrology, packaging, and assembly, Brugge, Belgium - Bellingham Duration: 28 Oct 2002 → 29 Oct 2002

Publication series

Name
Publisher	The International Society for Optical Engineering

Name
Volume	4945

Conference

Conference	MEMS/MOEMS: advances in photonic communications, sensing, metrology, packaging, and assembly, Brugge, Belgium
Period	28/10/02 → 29/10/02

Keywords

Elektrotechniek
Techniek
Conf.proc. > 3 pag

Cite this

Vdovin, GV., Akhzar-Mehr, O., Sarro, PM., de Lima Monteiro, DW., & Loktev, M. (2003). Arrays of spherical micromirrors and molded microlenses fabricated with bulk Si micromachining. In UF. Behringer, B. Courtois, AM. Khounsary, & DG. Uttamchandani (Eds.), Proceedings of SPIE; MEMS/MOENS: advances in photnic communications, sensing, metrology, packaging, and assembly (pp. 107-111). The International Society for Optical Engineering.

Vdovin, GV ; Akhzar-Mehr, O ; Sarro, PM ; de Lima Monteiro, DW ; Loktev, M. / Arrays of spherical micromirrors and molded microlenses fabricated with bulk Si micromachining. Proceedings of SPIE; MEMS/MOENS: advances in photnic communications, sensing, metrology, packaging, and assembly. editor / UF Behringer ; B Courtois ; AM Khounsary ; DG Uttamchandani. Bellingham : The International Society for Optical Engineering, 2003. pp. 107-111

@inproceedings{307031e3310943be9033c04055dec55e,

title = "Arrays of spherical micromirrors and molded microlenses fabricated with bulk Si micromachining",

keywords = "Elektrotechniek, Techniek, Conf.proc. > 3 pag",

author = "GV Vdovin and O Akhzar-Mehr and PM Sarro and {de Lima Monteiro}, DW and M Loktev",

year = "2003",

language = "Undefined/Unknown",

isbn = "0-8194-4740-4",

publisher = "The International Society for Optical Engineering",

pages = "107--111",

editor = "UF Behringer and B Courtois and AM Khounsary and DG Uttamchandani",

booktitle = "Proceedings of SPIE; MEMS/MOENS: advances in photnic communications, sensing, metrology, packaging, and assembly",

note = "null ; Conference date: 28-10-2002 Through 29-10-2002",

}

Vdovin, GV, Akhzar-Mehr, O, Sarro, PM, de Lima Monteiro, DW & Loktev, M 2003, Arrays of spherical micromirrors and molded microlenses fabricated with bulk Si micromachining. in UF Behringer, B Courtois, AM Khounsary & DG Uttamchandani (eds), Proceedings of SPIE; MEMS/MOENS: advances in photnic communications, sensing, metrology, packaging, and assembly. The International Society for Optical Engineering, Bellingham, pp. 107-111, MEMS/MOEMS: advances in photonic communications, sensing, metrology, packaging, and assembly, Brugge, Belgium, 28/10/02.

Arrays of spherical micromirrors and molded microlenses fabricated with bulk Si micromachining. / Vdovin, GV; Akhzar-Mehr, O; Sarro, PM; de Lima Monteiro, DW; Loktev, M.

Proceedings of SPIE; MEMS/MOENS: advances in photnic communications, sensing, metrology, packaging, and assembly. ed. / UF Behringer; B Courtois; AM Khounsary; DG Uttamchandani. Bellingham : The International Society for Optical Engineering, 2003. p. 107-111.

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

TY - GEN

T1 - Arrays of spherical micromirrors and molded microlenses fabricated with bulk Si micromachining

AU - Vdovin, GV

AU - Akhzar-Mehr, O

AU - Sarro, PM

AU - de Lima Monteiro, DW

AU - Loktev, M

PY - 2003

Y1 - 2003

KW - Elektrotechniek

KW - Techniek

KW - Conf.proc. > 3 pag

M3 - Conference contribution

SN - 0-8194-4740-4

SP - 107

EP - 111

BT - Proceedings of SPIE; MEMS/MOENS: advances in photnic communications, sensing, metrology, packaging, and assembly

A2 - Behringer, UF

A2 - Courtois, B

A2 - Khounsary, AM

A2 - Uttamchandani, DG

PB - The International Society for Optical Engineering

CY - Bellingham

Y2 - 28 October 2002 through 29 October 2002

ER -

Vdovin GV, Akhzar-Mehr O, Sarro PM, de Lima Monteiro DW, Loktev M. Arrays of spherical micromirrors and molded microlenses fabricated with bulk Si micromachining. In Behringer UF, Courtois B, Khounsary AM, Uttamchandani DG, editors, Proceedings of SPIE; MEMS/MOENS: advances in photnic communications, sensing, metrology, packaging, and assembly. Bellingham: The International Society for Optical Engineering. 2003. p. 107-111