Arrays of spherical micromirrors and molded microlenses fabricated with bulk Si micromachining

GV Vdovin, O Akhzar-Mehr, PM Sarro, DW de Lima Monteiro, M Loktev

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

Original languageUndefined/Unknown
Title of host publicationProceedings of SPIE; MEMS/MOENS: advances in photnic communications, sensing, metrology, packaging, and assembly
EditorsUF Behringer, B Courtois, AM Khounsary, DG Uttamchandani
Place of PublicationBellingham
PublisherThe International Society for Optical Engineering
Pages107-111
Number of pages5
ISBN (Print)0-8194-4740-4
Publication statusPublished - 2003
EventMEMS/MOEMS: advances in photonic communications, sensing, metrology, packaging, and assembly, Brugge, Belgium - Bellingham
Duration: 28 Oct 200229 Oct 2002

Publication series

Name
PublisherThe International Society for Optical Engineering
Name
Volume4945

Conference

ConferenceMEMS/MOEMS: advances in photonic communications, sensing, metrology, packaging, and assembly, Brugge, Belgium
Period28/10/0229/10/02

Keywords

  • Elektrotechniek
  • Techniek
  • Conf.proc. > 3 pag

Cite this