@inproceedings{772cd7ab5b424df2bd828129bd5d84fc,
title = "Aspect ratio and crystallographic orientation dependence in deep dry silicon etching at cryogenic temperatures",
keywords = "ZX Int.klas.verslagjaar < 2002",
author = "G Cracium and MA Blauw and {van der Drift}, EWJM and PJ French",
year = "2001",
language = "Undefined/Unknown",
isbn = "3-540-42150-5",
publisher = "Springer",
pages = "612--615",
booktitle = "Transducers '01: technical papers. Vol 1",
note = "11th International Conference on Solid-State Sensors and Actuators, Munich ; Conference date: 10-06-2001 Through 14-06-2001",
}