| Original language | English |
|---|---|
| Pages | 1-2 |
| Number of pages | 2 |
| Publication status | Published - 2012 |
| Event | 12th International conference on atomic layer deposition, Dresden, Germany - Dresden, Germany Duration: 17 Jun 2012 → 20 Jun 2012 |
Conference
| Conference | 12th International conference on atomic layer deposition, Dresden, Germany |
|---|---|
| Period | 17/06/12 → 20/06/12 |