Atmospheric pressure process for coating particles using atomic layer deposition

R Beetstra, U Lafont, J Nijenhuis, EM Kelder, JR van Ommen

Research output: Contribution to journalArticleScientificpeer-review

58 Citations (Scopus)
Original languageUndefined/Unknown
Pages (from-to)227-233
Number of pages7
JournalChemical Vapor Deposition
Volume15
Publication statusPublished - 2009

Keywords

  • professional journal papers
  • CWTS JFIS < 0.75

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