Atomic and molecular layer deposition: off the beaten track

Material Science

• Semiconductor Material 66%
• Surface 66%
• Novel Material 33%
• Nitride Compound 33%
• Temperature 33%
• Surface Area 33%
• Oxide Ceramics 33%
• Nanocrystalline Material 33%
• Catalysis 33%
• Gas 33%

INIS

• layers 100%
• deposition 100%
• substrates 15%
• reviews 15%
• chemistry 10%
• surfaces 10%
• applications 10%
• reactors 10%
• semiconductor materials 10%
• synthesis 10%
• control 5%
• increasing 5%
• ceramics 5%
• levels 5%
• surface area 5%
• energy 5%
• nanostructures 5%
• nitrides 5%
• oxides 5%
• energy storage 5%
• capture 5%
• growth 5%
• catalysis 5%
• gases 5%

Chemical Engineering

• Molecular Layer 100%
• Atomic Layer Deposition 100%
• Oxide 7%
• Nitride 7%
• Process Chemistry 7%
• Temperature 7%