Atomic layer deposition of CuxS.

L Reijnen, B Meester, APLM Goossens, J Schoonman

    Research output: Contribution to journalArticleScientificpeer-review

    2 Citations (Scopus)
    Original languageUndefined/Unknown
    Pages (from-to)1103-1107
    Number of pages5
    JournalThe European Physical Journal. Special Topics
    Volume11
    Publication statusPublished - 2001

    Keywords

    • ZX Int.klas.verslagjaar < 2002

    Cite this

    Reijnen, L., Meester, B., Goossens, APLM., & Schoonman, J. (2001). Atomic layer deposition of CuxS. The European Physical Journal. Special Topics, 11, 1103-1107.