Atomic layer deposition of CuxS.

L Reijnen, B Meester, APLM Goossens, J Schoonman

Research output: Contribution to journal › Article › Scientific › peer-review

Original language	Undefined/Unknown
Pages (from-to)	1103-1107
Number of pages	5
Journal	The European Physical Journal. Special Topics
Volume	11
Publication status	Published - 2001

Keywords

@article{26395f3a97734699ab753d47102baa41,

title = "Atomic layer deposition of CuxS.",

keywords = "ZX Int.klas.verslagjaar < 2002",

author = "L Reijnen and B Meester and APLM Goossens and J Schoonman",

year = "2001",

language = "Undefined/Unknown",

volume = "11",

pages = "1103--1107",

journal = "The European Physical Journal. Special Topics",

issn = "1155-4339",

publisher = "EDP Sciences",

}