|Number of pages||8|
|Journal||Nuclear Instruments & Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms|
|Publication status||Published - 1999|
Atomic-scale effects of sub-keV ions during growth and subsequent ion-beam analysis of molybdenum thin films.
P Klaver, EFC Haddeman, BJ Thijsse
Research output: Contribution to journal › Article › Scientific › peer-review