Atomic-scale effects of sub-keV ions during growth and subsequent ion-beam analysis of molybdenum thin films.

P Klaver, EFC Haddeman, BJ Thijsse

Research output: Contribution to journal › Article › Scientific › peer-review

Original language	Undefined/Unknown
Pages (from-to)	228-235
Number of pages	8
Journal	Nuclear Instruments & Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms
Volume	153
Publication status	Published - 1999

Cite this

@article{93d38eac80a0461384d85a33c34c95c8,

title = "Atomic-scale effects of sub-keV ions during growth and subsequent ion-beam analysis of molybdenum thin films.",

author = "P Klaver and EFC Haddeman and BJ Thijsse",

year = "1999",

language = "Undefined/Unknown",

volume = "153",

pages = "228--235",

journal = "Nuclear Instruments & Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms",

issn = "0168-583X",

publisher = "Elsevier",

}

Research output: Contribution to journal › Article › Scientific › peer-review

TY - JOUR

T1 - Atomic-scale effects of sub-keV ions during growth and subsequent ion-beam analysis of molybdenum thin films.

AU - Klaver, P

AU - Haddeman, EFC

AU - Thijsse, BJ

PY - 1999

Y1 - 1999

M3 - Article

SN - 0168-583X

VL - 153

SP - 228

EP - 235

JO - Nuclear Instruments & Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms

JF - Nuclear Instruments & Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms

ER -