Atomic-scale effects of sub-keV ions during growth and subsequent ion-beam analysis of molybdenum thin films.

P Klaver, EFC Haddeman, BJ Thijsse

    Research output: Contribution to journalArticleScientificpeer-review

    17 Citations (Scopus)
    Original languageUndefined/Unknown
    Pages (from-to)228-235
    Number of pages8
    JournalNuclear Instruments & Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms
    Volume153
    Publication statusPublished - 1999

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