Atomistic simulation of Cu/Ta thin film deposition and other phenomena

    Research output: ThesisDissertation (TU Delft)

    Original languageUndefined/Unknown
    QualificationDoctor of Philosophy
    Awarding Institution
    • Delft University of Technology
    Supervisors/Advisors
    • Thijsse, Barend, Supervisor
    Award date5 Oct 2004
    Place of PublicationDelft
    Publication statusPublished - 2004

    Keywords

    • Diss. prom. aan TU Delft

    Cite this