Auto-calibration of capacitive MEMS accelerometers based on pull-in voltage

LA Machado da Rocha, RA Dias, E Cretu, L Mol, RF Wolffenbuttel

Research output: Contribution to journal › Article › Scientific › peer-review

32 Citations (Scopus)

Original language	English
Pages (from-to)	429-436
Number of pages	8
Journal	Microsystem Technologies: micro and nanosystems - information storage and processing systems
Volume	17
Issue number	3
DOIs	https://doi.org/10.1007/s00542-011-1252-8
Publication status	Published - 2011

Access to Document

@article{0cef9f9f7d9c40628c73a94b2417f8c7,

title = "Auto-calibration of capacitive MEMS accelerometers based on pull-in voltage",

author = "{Machado da Rocha}, LA and RA Dias and E Cretu and L Mol and RF Wolffenbuttel",

year = "2011",

doi = "10.1007/s00542-011-1252-8",

language = "English",

volume = "17",

pages = "429--436",

journal = "Microsystem Technologies: micro and nanosystems - information storage and processing systems",

issn = "0946-7076",

publisher = "Springer",

number = "3",

}

TY - JOUR

T1 - Auto-calibration of capacitive MEMS accelerometers based on pull-in voltage

AU - Machado da Rocha, LA

AU - Dias, RA

AU - Cretu, E

AU - Mol, L

AU - Wolffenbuttel, RF

PY - 2011

Y1 - 2011

U2 - 10.1007/s00542-011-1252-8

DO - 10.1007/s00542-011-1252-8

M3 - Article

SN - 0946-7076

VL - 17

SP - 429

EP - 436

JO - Microsystem Technologies: micro and nanosystems - information storage and processing systems

JF - Microsystem Technologies: micro and nanosystems - information storage and processing systems

IS - 3

ER -