Auto-calibration of capacitive MEMS accelerometers based on pull-in voltage

LA Machado da Rocha, RA Dias, E Cretu, L Mol, RF Wolffenbuttel

Research output: Contribution to journalArticleScientificpeer-review

32 Citations (Scopus)
Original languageEnglish
Pages (from-to)429-436
Number of pages8
JournalMicrosystem Technologies: micro and nanosystems - information storage and processing systems
Issue number3
Publication statusPublished - 2011

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