Automated Contacting of On-Wafer Devices for RF Testing

F. Mubarak; C.D. Martino; R. Toskovic; G Rietveld; M. Spirito

doi:10.1109/CPEM49742.2020.9191800

Automated Contacting of On-Wafer Devices for RF Testing

F. Mubarak, C.D. Martino, R. Toskovic, G Rietveld, M. Spirito

Electronics

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

5 Citations (Scopus)

Abstract

A method is presented for automated probing of on-wafer devices for measurements at millimetre-wave frequencies. The proposed method automatically detects the contact between the measurement probe and on-wafer device, based on the evaluation of variation in the input reflection coefficient. It is shown that, using this automated technique, about five times better measurement repeatability is achieved in millimetre-wave device characterisation.

Original language	English
Title of host publication	2020 Conference on Precision Electromagnetic Measurements (CPEM)
Place of Publication	Danvers
Publisher	Institute of Electrical and Electronics Engineers (IEEE)
Pages	1-2
Number of pages	2
ISBN (Electronic)	978-1-7281-5898-3
ISBN (Print)	978-1-7281-5899-0
DOIs	https://doi.org/10.1109/CPEM49742.2020.9191800
Publication status	Published - 2020
Event	2020 Conference on Precision Electromagnetic Measurements, CPEM 2020 - Virtual, Denver, United States Duration: 24 Aug 2020 → 28 Aug 2020

Conference

Conference	2020 Conference on Precision Electromagnetic Measurements, CPEM 2020
Country/Territory	United States
City	Virtual, Denver
Period	24/08/20 → 28/08/20

Keywords

measurement techniques
measurement uncertainty
microwave measurements
on-wafer contacting
On-wafer probing
precision measurements
uncertainty

Access to Document

10.1109/CPEM49742.2020.9191800

Cite this

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title = "Automated Contacting of On-Wafer Devices for RF Testing",

abstract = "A method is presented for automated probing of on-wafer devices for measurements at millimetre-wave frequencies. The proposed method automatically detects the contact between the measurement probe and on-wafer device, based on the evaluation of variation in the input reflection coefficient. It is shown that, using this automated technique, about five times better measurement repeatability is achieved in millimetre-wave device characterisation. ",

keywords = "measurement techniques, measurement uncertainty, microwave measurements, on-wafer contacting, On-wafer probing, precision measurements, uncertainty",

author = "F. Mubarak and C.D. Martino and R. Toskovic and G Rietveld and M. Spirito",

year = "2020",

doi = "10.1109/CPEM49742.2020.9191800",

language = "English",

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pages = "1--2",

booktitle = "2020 Conference on Precision Electromagnetic Measurements (CPEM)",

publisher = "Institute of Electrical and Electronics Engineers (IEEE)",

address = "United States",

note = "2020 Conference on Precision Electromagnetic Measurements, CPEM 2020 ; Conference date: 24-08-2020 Through 28-08-2020",

}

Mubarak, F , Martino, CD, Toskovic, R, Rietveld, G & Spirito, M 2020, Automated Contacting of On-Wafer Devices for RF Testing. in 2020 Conference on Precision Electromagnetic Measurements (CPEM)., 9191800, Institute of Electrical and Electronics Engineers (IEEE), Danvers, pp. 1-2, 2020 Conference on Precision Electromagnetic Measurements, CPEM 2020, Virtual, Denver, United States, 24/08/20. https://doi.org/10.1109/CPEM49742.2020.9191800

Automated Contacting of On-Wafer Devices for RF Testing. / Mubarak, F.; Martino, C.D.; Toskovic, R. et al.
2020 Conference on Precision Electromagnetic Measurements (CPEM). Danvers: Institute of Electrical and Electronics Engineers (IEEE), 2020. p. 1-2 9191800.

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

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T1 - Automated Contacting of On-Wafer Devices for RF Testing

AU - Mubarak, F.

AU - Martino, C.D.

AU - Toskovic, R.

AU - Rietveld, G

AU - Spirito, M.

PY - 2020

Y1 - 2020

N2 - A method is presented for automated probing of on-wafer devices for measurements at millimetre-wave frequencies. The proposed method automatically detects the contact between the measurement probe and on-wafer device, based on the evaluation of variation in the input reflection coefficient. It is shown that, using this automated technique, about five times better measurement repeatability is achieved in millimetre-wave device characterisation.

AB - A method is presented for automated probing of on-wafer devices for measurements at millimetre-wave frequencies. The proposed method automatically detects the contact between the measurement probe and on-wafer device, based on the evaluation of variation in the input reflection coefficient. It is shown that, using this automated technique, about five times better measurement repeatability is achieved in millimetre-wave device characterisation.

KW - measurement techniques

KW - measurement uncertainty

KW - microwave measurements

KW - on-wafer contacting

KW - On-wafer probing

KW - precision measurements

KW - uncertainty

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U2 - 10.1109/CPEM49742.2020.9191800

DO - 10.1109/CPEM49742.2020.9191800

M3 - Conference contribution

AN - SCOPUS:85092174360

SN - 978-1-7281-5899-0

SP - 1

EP - 2

BT - 2020 Conference on Precision Electromagnetic Measurements (CPEM)

PB - Institute of Electrical and Electronics Engineers (IEEE)

CY - Danvers

T2 - 2020 Conference on Precision Electromagnetic Measurements, CPEM 2020

Y2 - 24 August 2020 through 28 August 2020

ER -

Automated Contacting of On-Wafer Devices for RF Testing

Abstract

Conference

Keywords

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