Automated Contacting of On-Wafer Devices for RF Testing

F. Mubarak, C.D. Martino, R. Toskovic, G Rietveld, M. Spirito

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

Abstract

A method is presented for automated probing of on-wafer devices for measurements at millimetre-wave frequencies. The proposed method automatically detects the contact between the measurement probe and on-wafer device, based on the evaluation of variation in the input reflection coefficient. It is shown that, using this automated technique, about five times better measurement repeatability is achieved in millimetre-wave device characterisation.

Original languageEnglish
Title of host publication2020 Conference on Precision Electromagnetic Measurements (CPEM)
Place of PublicationDanvers
PublisherInstitute of Electrical and Electronics Engineers (IEEE)
Pages1-2
Number of pages2
ISBN (Electronic)978-1-7281-5898-3
ISBN (Print)978-1-7281-5899-0
DOIs
Publication statusPublished - 2020
Event2020 Conference on Precision Electromagnetic Measurements, CPEM 2020 - Virtual, Denver, United States
Duration: 24 Aug 202028 Aug 2020

Conference

Conference2020 Conference on Precision Electromagnetic Measurements, CPEM 2020
CountryUnited States
CityVirtual, Denver
Period24/08/2028/08/20

Keywords

  • measurement techniques
  • measurement uncertainty
  • microwave measurements
  • on-wafer contacting
  • On-wafer probing
  • precision measurements
  • uncertainty

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