Avoiding unstable regions in the design space of EUV mirror systems comprising high-order aspheric surfaces

OE Marinescu, F Bociort, JJM Braat

Research output: Contribution to journal › Conference article › Scientific › peer-review

Original language	Undefined/Unknown
Pages (from-to)	185-192
Number of pages	8
Journal	Proceedings of SPIE- International Society for Optical Engineering
Volume	5523
Publication status	Published - 2004

Keywords

@article{0675fe685e644792b2f08ef640407217,

title = "Avoiding unstable regions in the design space of EUV mirror systems comprising high-order aspheric surfaces",

keywords = "Peer-lijst tijdschrift",

author = "OE Marinescu and F Bociort and JJM Braat",

year = "2004",

language = "Undefined/Unknown",

volume = "5523",

pages = "185--192",

journal = "Proceedings of SPIE- International Society for Optical Engineering",

issn = "0277-786X",

publisher = "SPIE",

}

TY - JOUR

T1 - Avoiding unstable regions in the design space of EUV mirror systems comprising high-order aspheric surfaces

AU - Marinescu, OE

AU - Bociort, F

AU - Braat, JJM

PY - 2004

Y1 - 2004

KW - Peer-lijst tijdschrift

M3 - Conference article

SN - 0277-786X

VL - 5523

SP - 185

EP - 192

JO - Proceedings of SPIE- International Society for Optical Engineering

JF - Proceedings of SPIE- International Society for Optical Engineering

ER -