Avoiding unstable regions in the design space of EUV mirror systems comprising high-order aspheric surfaces

OE Marinescu, F Bociort, JJM Braat

Research output: Contribution to journalConference articleScientificpeer-review

3 Citations (Scopus)
Original languageUndefined/Unknown
Pages (from-to)185-192
Number of pages8
JournalProceedings of SPIE- International Society for Optical Engineering
Publication statusPublished - 2004


  • Peer-lijst tijdschrift

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