Backside illuminated CMOS image sensors for extreme ultraviolet applications

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

2 Citations (Scopus)
Original languageEnglish
Title of host publicationProceedings 2014 IEEE Sensors
EditorsFJ Arregui
Place of PublicationPiscataway, NJ, USA
PublisherIEEE Society
Pages1660-1663
Number of pages4
ISBN (Print)978-1-4799-0161-6
DOIs
Publication statusPublished - 2014
EventIEEE Sensors 2014 - Valencia Conference Centre, Valencia, Spain
Duration: 2 Nov 20145 Nov 2014
http://ieee-sensors2014.org/

Conference

ConferenceIEEE Sensors 2014
CountrySpain
CityValencia
Period2/11/145/11/14
Internet address

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