Baseline of the High Density Plasma Deposition tool asessed in SiO2 deposition

JBC van de Hilst, DJ de Boer, GCAM Janssen, S Radelaar

    Research output: Book/ReportReportProfessional

    Original languageEnglish
    Place of PublicationDelft
    PublisherDelft University of Technology
    Number of pages13
    Publication statusPublished - 1996

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    Name
    PublisherTechnische Universiteit Delft

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