Multi-electron-beam deflector array

AC Zonnevylle, CTH Heerkens, CW Hagen, P Kruit

    Research output: Contribution to journalArticleScientificpeer-review

    3 Citations (Scopus)
    Original languageUndefined/Unknown
    Pages (from-to)140-148
    Number of pages9
    JournalMicroelectronic Engineering
    Volume123
    Publication statusPublished - 2014

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