Original language | English |
---|---|
IPC | H01L, G03F |
Priority date | 28/07/22 |
Publication status | Published - 2021 |
Bibliographical note
Patent:OCT-20-065Applicant: TU Delft
M. Gandhi (Inventor), S. Hassan HosseinNia (Inventor), N. Saikumar (Inventor), A. Hunt (Inventor)
Research output: Patent
Original language | English |
---|---|
IPC | H01L, G03F |
Priority date | 28/07/22 |
Publication status | Published - 2021 |