AnXYstage

M. Gandhi (Inventor), S. Hassan HosseinNia (Inventor), N. Saikumar (Inventor), A. Hunt (Inventor)

Research output: Patent

Original languageEnglish
IPCH01L, G03F
Priority date28/07/22
Publication statusPublished - 2021

Bibliographical note

Patent:OCT-20-065
Applicant: TU Delft

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