Original language | English |
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IPC | Ho1J37/147, Ho1j37/05, Ho1J37/153 |
Priority date | 31/05/19 |
Publication status | Published - 2020 |
Bibliographical note
Patent: OCT-19-033Applicant: Hitachi High-Technologies Corporation
P. Kruit (Inventor)
Research output: Patent
Original language | English |
---|---|
IPC | Ho1J37/147, Ho1j37/05, Ho1J37/153 |
Priority date | 31/05/19 |
Publication status | Published - 2020 |