@article{3d4e99ca606e46ed90ab85928d627dea,
title = "Beam induced deposition of platinum using a helium ion microscope",
keywords = "academic journal papers, CWTS JFIS < 0.75",
author = "C.A. Sanford and L. Stern and L. Barriss and L. Farkas and M. DiManna and R. Mello and D Maas and PFA Alkemade",
year = "2009",
doi = "Doi:10.1116/1.3237095",
language = "Undefined/Unknown",
volume = "27",
pages = "2660--2667",
journal = "Journal of Vacuum Science and Technology. Part B: Microelectronics and Nanometer Structures",
issn = "1071-1023",
publisher = "AVS Science and Technology Society",
number = "6",
}