Beam induced deposition of platinum using a helium ion microscope

C.A. Sanford, L. Stern, L. Barriss, L. Farkas, M. DiManna, R. Mello, D Maas, PFA Alkemade

Research output: Contribution to journalArticleScientificpeer-review

41 Citations (Scopus)
Original languageUndefined/Unknown
Pages (from-to)2660-2667
Number of pages8
JournalJournal of Vacuum Science and Technology. Part B: Microelectronics and Nanometer Structures
Volume27
Issue number6
DOIs
Publication statusPublished - 2009

Keywords

  • academic journal papers
  • CWTS JFIS < 0.75

Cite this