Beam scanning coherent Fourier scatterometry

S. Soman*, S.F. Pereira

*Corresponding author for this work

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

2 Downloads (Pure)

Abstract

The significance of precise metrology in various industries, particularly within manufacturing plants, is undeniable, especially as components and devices continue to undergo miniaturization. The emergence of nano-manufacturing further amplifies the necessity for meticulous measurement techniques. Coherent Fourier scatterometry (CFS) is a nonimaging, model-based, bright-field optical metrology and inspection technique used for retrieving complex geometric parameters of nanostructures and for detecting isolated nanoparticles and contamination on surfaces. It uses a focused light spot to illuminate the sample and the scattered light is collected as the sample is scanned in the lateral direction. However, the time it takes to inspect a certain area has been a limiting factor in its wider adoption as a commercial metrology tool. To address this limitation, we propose a novel design of CFS utilizing a galvo mirror for faster scanning of the laser spot on the sample, offering significant improvements in scan speed.
Original languageEnglish
Title of host publicationOptical Instrument Science, Technology, and Applications III
EditorsHolger Münz, Breann N. Sitarski, Richard N. Youngworth
Place of PublicationBellingham, WA
PublisherSPIE
Number of pages5
ISBN (Electronic)9781510673670
ISBN (Print)9781510673663
DOIs
Publication statusPublished - 2024
EventOptical Instrument Science, Technology, and Applications III 2024 - Strasbourg, France
Duration: 10 Apr 202411 Apr 2024

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume13024
ISSN (Print)0277-786X
ISSN (Electronic)1996-756X

Conference

ConferenceOptical Instrument Science, Technology, and Applications III 2024
Country/TerritoryFrance
CityStrasbourg
Period10/04/2411/04/24

Bibliographical note

SPIE grants to authors (and their employers) of papers, posters, and presentation recordings published in SPIE Proceedings or SPIE Journals on the SPIE Digital Library (hereinafter "publications") the right to post an author-prepared version or an official version (preferred) of the publication on an internal or external server controlled exclusively by the author/employer or the entity funding the research, provided that (a) such posting is noncommercial in nature and the publication is made available to users without charge; (b) an appropriate copyright notice and citation appear with the publication; and (c) a link to SPIE's official online version of the publication is provided using the item's DOI.

Keywords

  • contamination inspection
  • optical metrology
  • scanning
  • scatterometry

Fingerprint

Dive into the research topics of 'Beam scanning coherent Fourier scatterometry'. Together they form a unique fingerprint.

Cite this