@inproceedings{ce18231758c14f84a420123aa3dccdf2,
title = "Beam scanning coherent Fourier scatterometry",
abstract = "The significance of precise metrology in various industries, particularly within manufacturing plants, is undeniable, especially as components and devices continue to undergo miniaturization. The emergence of nano-manufacturing further amplifies the necessity for meticulous measurement techniques. Coherent Fourier scatterometry (CFS) is a nonimaging, model-based, bright-field optical metrology and inspection technique used for retrieving complex geometric parameters of nanostructures and for detecting isolated nanoparticles and contamination on surfaces. It uses a focused light spot to illuminate the sample and the scattered light is collected as the sample is scanned in the lateral direction. However, the time it takes to inspect a certain area has been a limiting factor in its wider adoption as a commercial metrology tool. To address this limitation, we propose a novel design of CFS utilizing a galvo mirror for faster scanning of the laser spot on the sample, offering significant improvements in scan speed.",
keywords = "contamination inspection, optical metrology, scanning, scatterometry",
author = "S. Soman and S.F. Pereira",
note = "SPIE grants to authors (and their employers) of papers, posters, and presentation recordings published in SPIE Proceedings or SPIE Journals on the SPIE Digital Library (hereinafter {"}publications{"}) the right to post an author-prepared version or an official version (preferred) of the publication on an internal or external server controlled exclusively by the author/employer or the entity funding the research, provided that (a) such posting is noncommercial in nature and the publication is made available to users without charge; (b) an appropriate copyright notice and citation appear with the publication; and (c) a link to SPIE's official online version of the publication is provided using the item's DOI.; Optical Instrument Science, Technology, and Applications III 2024 ; Conference date: 10-04-2024 Through 11-04-2024",
year = "2024",
doi = "10.1117/12.3022937",
language = "English",
isbn = "9781510673663",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
publisher = "SPIE",
editor = "Holger M{\"u}nz and Sitarski, {Breann N.} and Youngworth, {Richard N.}",
booktitle = "Optical Instrument Science, Technology, and Applications III",
address = "United States",
}