BiCMOS Integrated Waveguide with Artificial Dielectric at Submillimeter Wave Frequencies

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

2 Citations (Scopus)

Abstract

In this paper we present a synthetic waveguide integrated in a commercial BiCMOS back-end-of-line, employing artificial dielectrics (ADs) to reduce the component size. The AD is realized by employing floating pillars using the various layers available in the technology, thus fulfilling metal density rule and boosting the effective permittivity of the host medium (i.e., SiO2) to 12.5. The impact of the AD translates in a 56% width reduction of the waveguide, for the same cutoff frequency. The structure provides 1.6dB of losses per guide wavelength (λg) at 300GHz and more than 30dB suppression below 180GHz, avoiding the need of filters in multiplication stages.
Original languageEnglish
Title of host publication2016 IEEE MTT-S International Microwave Symposium (IMS)
PublisherIEEE
Pages1-4
Number of pages4
ISBN (Electronic)978-1-5090-0698-4
DOIs
Publication statusPublished - 11 Aug 2016
EventIEEE MTT-S International Microwave Symposium (IMS) 2016 - San Francisco, United States
Duration: 22 May 201627 May 2016

Conference

ConferenceIEEE MTT-S International Microwave Symposium (IMS) 2016
Abbreviated titleIMS 2016
CountryUnited States
CitySan Francisco
Period22/05/1627/05/16

Keywords

  • submillimeter-wave
  • BiCMOS
  • integrated waveguide
  • ificial dielectric (AD)

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