@inproceedings{774519b897dd476f82830fecc116ad13,
title = "Bimorph actuators in thick SiO2 for photonic alignment",
abstract = "This paper proposes and tests a design of electro-thermal bimorph actuators for alignment of flexible photonic waveguides fabricated in 16 μm thick SiO2. The actuators are for use in a novel alignment concept for multi-port photonic integrated circuits (PICs), in which the fine alignment is taken care of by positioning of suspended, mechanically flexible waveguide beams on one or more of the PICs. The design parameters of the bimorph actuator allow to tune both the initial relative position of the waveguide end-facets, and the motion range of the actuators. Bimorph actuators have been fabricated and characterized. The maximum out-of-plane deflection of the bimorph actuator (with 720 μm-long poly-Si) can reach 18:5 μm with 126:42mW, sufficient for the proposed application.",
keywords = "bimorph actuators, out-of-plane deection, poly-Si, short-loop, SiO MEMS",
author = "Kai Wu and Peters, {Tjitte Jelte} and Marcel Tichem and Ferry Postma and Albert Prak and Kerstin W{\"o}rhoff and Arne Leinse",
year = "2016",
doi = "10.1117/12.2209499",
language = "English",
volume = "9753",
series = "Proceedings of SPIE",
publisher = "SPIE",
editor = "Henning Schr{\"o}der and Chen, {Ray T.}",
booktitle = "Optical Interconnects XVI",
address = "United States",
note = "Optical Interconnects XVI ; Conference date: 15-02-2016 Through 17-02-2016",
}