Bimorph actuators in thick SiO2 for photonic alignment

Kai Wu; Tjitte Jelte Peters; Marcel Tichem; Ferry Postma; Albert Prak; Kerstin Wörhoff; Arne Leinse

doi:10.1117/12.2209499

Bimorph actuators in thick SiO₂ for photonic alignment

Kai Wu^*, Tjitte Jelte Peters, Marcel Tichem, Ferry Postma, Albert Prak, Kerstin Wörhoff, Arne Leinse

^*Corresponding author for this work

Micro and Nano Engineering

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

6 Citations (Scopus)

114 Downloads (Pure)

Abstract

This paper proposes and tests a design of electro-thermal bimorph actuators for alignment of flexible photonic waveguides fabricated in 16 μm thick SiO². The actuators are for use in a novel alignment concept for multi-port photonic integrated circuits (PICs), in which the fine alignment is taken care of by positioning of suspended, mechanically flexible waveguide beams on one or more of the PICs. The design parameters of the bimorph actuator allow to tune both the initial relative position of the waveguide end-facets, and the motion range of the actuators. Bimorph actuators have been fabricated and characterized. The maximum out-of-plane deflection of the bimorph actuator (with 720 μm-long poly-Si) can reach 18:5 μm with 126:42mW, sufficient for the proposed application.

Original language	English
Title of host publication	Optical Interconnects XVI
Editors	Henning Schröder, Ray T. Chen
Place of Publication	Bellingham, WA, USA
Publisher	SPIE
Number of pages	10
Volume	9753
ISBN (Electronic)	978-1-628419887
DOIs	https://doi.org/10.1117/12.2209499
Publication status	Published - 2016
Event	Optical Interconnects XVI - San Francisco, United States Duration: 15 Feb 2016 → 17 Feb 2016

Publication series

Name	Proceedings of SPIE
Volume	9753
ISSN (Electronic)	1605-7422

Conference

Conference	Optical Interconnects XVI
Country/Territory	United States
City	San Francisco
Period	15/02/16 → 17/02/16

Keywords

bimorph actuators
out-of-plane deection
poly-Si
short-loop
SiO MEMS

Access to Document

10.1117/12.2209499

975311Final published version, 1.54 MB

Cite this

@inproceedings{774519b897dd476f82830fecc116ad13,

title = "Bimorph actuators in thick SiO2 for photonic alignment",

abstract = "This paper proposes and tests a design of electro-thermal bimorph actuators for alignment of flexible photonic waveguides fabricated in 16 μm thick SiO2. The actuators are for use in a novel alignment concept for multi-port photonic integrated circuits (PICs), in which the fine alignment is taken care of by positioning of suspended, mechanically flexible waveguide beams on one or more of the PICs. The design parameters of the bimorph actuator allow to tune both the initial relative position of the waveguide end-facets, and the motion range of the actuators. Bimorph actuators have been fabricated and characterized. The maximum out-of-plane deflection of the bimorph actuator (with 720 μm-long poly-Si) can reach 18:5 μm with 126:42mW, sufficient for the proposed application.",

keywords = "bimorph actuators, out-of-plane deection, poly-Si, short-loop, SiO MEMS",

author = "Kai Wu and Peters, {Tjitte Jelte} and Marcel Tichem and Ferry Postma and Albert Prak and Kerstin W{\"o}rhoff and Arne Leinse",

year = "2016",

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editor = "Henning Schr{\"o}der and Chen, {Ray T.}",

booktitle = "Optical Interconnects XVI",

address = "United States",

note = "Optical Interconnects XVI ; Conference date: 15-02-2016 Through 17-02-2016",

}

Wu, K, Peters, TJ, Tichem, M, Postma, F, Prak, A, Wörhoff, K & Leinse, A 2016, Bimorph actuators in thick SiO₂ for photonic alignment. in H Schröder & RT Chen (eds), Optical Interconnects XVI. vol. 9753, 975311, Proceedings of SPIE, vol. 9753, SPIE, Bellingham, WA, USA, Optical Interconnects XVI, San Francisco, United States, 15/02/16. https://doi.org/10.1117/12.2209499

Bimorph actuators in thick SiO₂ for photonic alignment. / Wu, Kai; Peters, Tjitte Jelte; Tichem, Marcel et al.
Optical Interconnects XVI. ed. / Henning Schröder; Ray T. Chen. Vol. 9753 Bellingham, WA, USA: SPIE, 2016. 975311 (Proceedings of SPIE; Vol. 9753).

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

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AU - Wörhoff, Kerstin

AU - Leinse, Arne

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N2 - This paper proposes and tests a design of electro-thermal bimorph actuators for alignment of flexible photonic waveguides fabricated in 16 μm thick SiO2. The actuators are for use in a novel alignment concept for multi-port photonic integrated circuits (PICs), in which the fine alignment is taken care of by positioning of suspended, mechanically flexible waveguide beams on one or more of the PICs. The design parameters of the bimorph actuator allow to tune both the initial relative position of the waveguide end-facets, and the motion range of the actuators. Bimorph actuators have been fabricated and characterized. The maximum out-of-plane deflection of the bimorph actuator (with 720 μm-long poly-Si) can reach 18:5 μm with 126:42mW, sufficient for the proposed application.

AB - This paper proposes and tests a design of electro-thermal bimorph actuators for alignment of flexible photonic waveguides fabricated in 16 μm thick SiO2. The actuators are for use in a novel alignment concept for multi-port photonic integrated circuits (PICs), in which the fine alignment is taken care of by positioning of suspended, mechanically flexible waveguide beams on one or more of the PICs. The design parameters of the bimorph actuator allow to tune both the initial relative position of the waveguide end-facets, and the motion range of the actuators. Bimorph actuators have been fabricated and characterized. The maximum out-of-plane deflection of the bimorph actuator (with 720 μm-long poly-Si) can reach 18:5 μm with 126:42mW, sufficient for the proposed application.

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