Bimorph actuators in thick SiO2 for photonic alignment

Kai Wu*, Tjitte Jelte Peters, Marcel Tichem, Ferry Postma, Albert Prak, Kerstin Wörhoff, Arne Leinse

*Corresponding author for this work

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

5 Citations (Scopus)
106 Downloads (Pure)

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