Bulk Acoustic Wave Based Mocrfluidic Particle Sorting with Capacitive Micromachined Ultrasonic Transducers

Shinnosuke Kawasaki; Jia-Jun  Yeh; Mart Saccher; Jian  Li; Ronald Dekker

doi:10.1109/MEMS51670.2022.9699807

Bulk Acoustic Wave Based Mocrfluidic Particle Sorting with Capacitive Micromachined Ultrasonic Transducers

Shinnosuke Kawasaki, Jia-Jun Yeh, Mart Saccher, Jian Li, Ronald Dekker

Electronic Components, Technology and Materials

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

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Abstract

The main limitation of acoustic particle separation for microfluidic application is its low sorting efficiency. This is due to the weak coupling of surface acoustic waves (SAWs) into the microchannel. In this work, we demonstrate bulk acoustic wave (BAW) particle sorting using capacitive micromachined ultrasonic transducers (CMUTs) for the first time. A collapsed mode CMUT was driven in air to generate acoustic pressure within the silicon substrate in the in-plane direction of the silicon die. This acoustic pressure was coupled into a water droplet, positioned at the side of the CMUT die, and measured with an optical hydrophone. By using a beam steering approach, the ultrasound generated from 32 CMUT elements were added in-phase to generate a maximum peak-to-peak pressure of 0.9 MPa. Using this pressure, 10 µm latex beads were sorted almost instantaneously.

Original language	English
Title of host publication	Proceedings of the 2022 IEEE 35th International Conference on Micro Electro Mechanical Systems Conference (MEMS)
Place of Publication	Danvers
Publisher	IEEE
Pages	908-911
Number of pages	4
ISBN (Electronic)	978-1-6654-0911-7
ISBN (Print)	978-1-6654-0912-4
DOIs	https://doi.org/10.1109/MEMS51670.2022.9699807
Publication status	Published - 2022
Event	2022 IEEE 35th International Conference on Micro Electro Mechanical Systems Conference (MEMS) - Hybrid at Tokyo, Japan Duration: 9 Jan 2022 → 13 Jan 2022 Conference number: 35th

Conference

Conference	2022 IEEE 35th International Conference on Micro Electro Mechanical Systems Conference (MEMS)
Abbreviated title	MEMS 2022
Country/Territory	Japan
City	Hybrid at Tokyo
Period	9/01/22 → 13/01/22

Bibliographical note

Green Open Access added to TU Delft Institutional Repository 'You share, we take care!' - Taverne project https://www.openaccess.nl/en/you-share-we-take-care

Otherwise as indicated in the copyright section: the publisher is the copyright holder of this work and the author uses the Dutch legislation to make this work public.

Keywords

CMUT
Microfluidic particle sorting
Acoustic particle sorting
bulk acoustic wave

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10.1109/MEMS51670.2022.9699807

Bulk_Acoustic_Wave_Based_Mocrfluidic_Particle_Sorting_with_Capacitive_Micromachined_Ultrasonic_TransducersFinal published version, 1.26 MB

Cite this

Kawasaki, S., Yeh, J.-J., Saccher, M., Li, J., & Dekker, R. (2022). Bulk Acoustic Wave Based Mocrfluidic Particle Sorting with Capacitive Micromachined Ultrasonic Transducers. In Proceedings of the 2022 IEEE 35th International Conference on Micro Electro Mechanical Systems Conference (MEMS) (pp. 908-911). Article 9699807 IEEE. https://doi.org/10.1109/MEMS51670.2022.9699807

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title = "Bulk Acoustic Wave Based Mocrfluidic Particle Sorting with Capacitive Micromachined Ultrasonic Transducers",

abstract = "The main limitation of acoustic particle separation for microfluidic application is its low sorting efficiency. This is due to the weak coupling of surface acoustic waves (SAWs) into the microchannel. In this work, we demonstrate bulk acoustic wave (BAW) particle sorting using capacitive micromachined ultrasonic transducers (CMUTs) for the first time. A collapsed mode CMUT was driven in air to generate acoustic pressure within the silicon substrate in the in-plane direction of the silicon die. This acoustic pressure was coupled into a water droplet, positioned at the side of the CMUT die, and measured with an optical hydrophone. By using a beam steering approach, the ultrasound generated from 32 CMUT elements were added in-phase to generate a maximum peak-to-peak pressure of 0.9 MPa. Using this pressure, 10 µm latex beads were sorted almost instantaneously.",

keywords = "CMUT, Microfluidic particle sorting, Acoustic particle sorting, bulk acoustic wave",

author = "Shinnosuke Kawasaki and Jia-Jun Yeh and Mart Saccher and Jian Li and Ronald Dekker",

note = "Green Open Access added to TU Delft Institutional Repository 'You share, we take care!' - Taverne project https://www.openaccess.nl/en/you-share-we-take-care Otherwise as indicated in the copyright section: the publisher is the copyright holder of this work and the author uses the Dutch legislation to make this work public.; 2022 IEEE 35th International Conference on Micro Electro Mechanical Systems Conference (MEMS), MEMS 2022 ; Conference date: 09-01-2022 Through 13-01-2022",

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doi = "10.1109/MEMS51670.2022.9699807",

language = "English",

isbn = "978-1-6654-0912-4",

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booktitle = "Proceedings of the 2022 IEEE 35th International Conference on Micro Electro Mechanical Systems Conference (MEMS)",

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}

Kawasaki, S, Yeh, J-J, Saccher, M, Li, J & Dekker, R 2022, Bulk Acoustic Wave Based Mocrfluidic Particle Sorting with Capacitive Micromachined Ultrasonic Transducers. in Proceedings of the 2022 IEEE 35th International Conference on Micro Electro Mechanical Systems Conference (MEMS)., 9699807, IEEE, Danvers, pp. 908-911, 2022 IEEE 35th International Conference on Micro Electro Mechanical Systems Conference (MEMS), Hybrid at Tokyo, Japan, 9/01/22. https://doi.org/10.1109/MEMS51670.2022.9699807

Bulk Acoustic Wave Based Mocrfluidic Particle Sorting with Capacitive Micromachined Ultrasonic Transducers. / Kawasaki, Shinnosuke; Yeh, Jia-Jun ; Saccher, Mart et al.
Proceedings of the 2022 IEEE 35th International Conference on Micro Electro Mechanical Systems Conference (MEMS). Danvers: IEEE, 2022. p. 908-911 9699807.

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

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T1 - Bulk Acoustic Wave Based Mocrfluidic Particle Sorting with Capacitive Micromachined Ultrasonic Transducers

AU - Kawasaki, Shinnosuke

AU - Yeh, Jia-Jun

AU - Saccher, Mart

AU - Li, Jian

AU - Dekker, Ronald

N1 - Conference code: 35th

PY - 2022

Y1 - 2022

N2 - The main limitation of acoustic particle separation for microfluidic application is its low sorting efficiency. This is due to the weak coupling of surface acoustic waves (SAWs) into the microchannel. In this work, we demonstrate bulk acoustic wave (BAW) particle sorting using capacitive micromachined ultrasonic transducers (CMUTs) for the first time. A collapsed mode CMUT was driven in air to generate acoustic pressure within the silicon substrate in the in-plane direction of the silicon die. This acoustic pressure was coupled into a water droplet, positioned at the side of the CMUT die, and measured with an optical hydrophone. By using a beam steering approach, the ultrasound generated from 32 CMUT elements were added in-phase to generate a maximum peak-to-peak pressure of 0.9 MPa. Using this pressure, 10 µm latex beads were sorted almost instantaneously.

AB - The main limitation of acoustic particle separation for microfluidic application is its low sorting efficiency. This is due to the weak coupling of surface acoustic waves (SAWs) into the microchannel. In this work, we demonstrate bulk acoustic wave (BAW) particle sorting using capacitive micromachined ultrasonic transducers (CMUTs) for the first time. A collapsed mode CMUT was driven in air to generate acoustic pressure within the silicon substrate in the in-plane direction of the silicon die. This acoustic pressure was coupled into a water droplet, positioned at the side of the CMUT die, and measured with an optical hydrophone. By using a beam steering approach, the ultrasound generated from 32 CMUT elements were added in-phase to generate a maximum peak-to-peak pressure of 0.9 MPa. Using this pressure, 10 µm latex beads were sorted almost instantaneously.

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KW - Microfluidic particle sorting

KW - Acoustic particle sorting

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DO - 10.1109/MEMS51670.2022.9699807

M3 - Conference contribution

SN - 978-1-6654-0912-4

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EP - 911

BT - Proceedings of the 2022 IEEE 35th International Conference on Micro Electro Mechanical Systems Conference (MEMS)

PB - IEEE

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T2 - 2022 IEEE 35th International Conference on Micro Electro Mechanical Systems Conference (MEMS)

Y2 - 9 January 2022 through 13 January 2022

ER -

Bulk Acoustic Wave Based Mocrfluidic Particle Sorting with Capacitive Micromachined Ultrasonic Transducers

Abstract

Conference

Bibliographical note

Keywords

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