Bulk Acoustic Wave Based Mocrfluidic Particle Sorting with Capacitive Micromachined Ultrasonic Transducers

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

Abstract

The main limitation of acoustic particle separation for microfluidic application is its low sorting efficiency. This is due to the weak coupling of surface acoustic waves (SAWs) into the microchannel. In this work, we demonstrate bulk acoustic wave (BAW) particle sorting using capacitive micromachined ultrasonic transducers (CMUTs) for the first time. A collapsed mode CMUT was driven in air to generate acoustic pressure within the silicon substrate in the in-plane direction of the silicon die. This acoustic pressure was coupled into a water droplet, positioned at the side of the CMUT die, and measured with an optical hydrophone. By using a beam steering approach, the ultrasound generated from 32 CMUT elements were added in-phase to generate a maximum peak-to-peak pressure of 0.9 MPa. Using this pressure, 10 µm latex beads were sorted almost instantaneously.
Original languageEnglish
Title of host publicationProceedings of the 2022 IEEE 35th International Conference on Micro Electro Mechanical Systems Conference (MEMS)
Place of PublicationDanvers
PublisherIEEE
Pages908-911
Number of pages4
ISBN (Electronic)978-1-6654-0911-7
ISBN (Print)978-1-6654-0912-4
DOIs
Publication statusPublished - 2022
Event2022 IEEE 35th International Conference on Micro Electro Mechanical Systems Conference (MEMS) - Hybrid at Tokyo, Japan
Duration: 9 Jan 202213 Jan 2022
Conference number: 35th

Conference

Conference2022 IEEE 35th International Conference on Micro Electro Mechanical Systems Conference (MEMS)
Abbreviated titleMEMS 2022
Country/TerritoryJapan
CityHybrid at Tokyo
Period9/01/2213/01/22

Bibliographical note

Green Open Access added to TU Delft Institutional Repository 'You share, we take care!' - Taverne project https://www.openaccess.nl/en/you-share-we-take-care

Otherwise as indicated in the copyright section: the publisher is the copyright holder of this work and the author uses the Dutch legislation to make this work public.

Keywords

  • CMUT
  • Microfluidic particle sorting
  • Acoustic particle sorting
  • bulk acoustic wave

Fingerprint

Dive into the research topics of 'Bulk Acoustic Wave Based Mocrfluidic Particle Sorting with Capacitive Micromachined Ultrasonic Transducers'. Together they form a unique fingerprint.

Cite this