Bulk micromachined electrostatic RMS-to-DC converter

G de Graaf, M Bartek, Z Xiao, CJ Mullem, RF Wolffenbuttel

Research output: Contribution to journalArticleScientificpeer-review

12 Citations (Scopus)
Original languageUndefined/Unknown
Pages (from-to)1508-1512
Number of pages5
JournalIEEE Transactions on Instrumentation and Measurement
Volume50
Issue number6
Publication statusPublished - 2001

Keywords

  • ZX CWTS JFIS < 1.00

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