Bulk-micromachined electrostatic RMS-to-DC converter: design and fabrication

M Bartek, Z Xiao, CJ van Mullem, RF Wolffenbuttel

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific

Original language	Undefined/Unknown
Title of host publication	MME '00
Place of Publication	S.l.
Publisher	s.n.
Pages	1-4
Number of pages	4
Publication status	Published - 2000
Event	Micromechanics Europe, Uppsala - S.l. Duration: 1 Oct 2000 → 3 Oct 2000

Name
Publisher	S.n.

Conference	Micromechanics Europe, Uppsala
Period	1/10/00 → 3/10/00

Keywords

@inproceedings{a5e96a45aeb948ae8aa161bd040f4fe0,

title = "Bulk-micromachined electrostatic RMS-to-DC converter: design and fabrication",

keywords = "ZX Int.klas.verslagjaar < 2002",

author = "M Bartek and Z Xiao and {van Mullem}, CJ and RF Wolffenbuttel",

year = "2000",

language = "Undefined/Unknown",

publisher = "s.n.",

pages = "1--4",

booktitle = "MME '00",

note = "Micromechanics Europe, Uppsala ; Conference date: 01-10-2000 Through 03-10-2000",

}

TY - GEN

T1 - Bulk-micromachined electrostatic RMS-to-DC converter: design and fabrication

AU - Bartek, M

AU - Xiao, Z

AU - van Mullem, CJ

AU - Wolffenbuttel, RF

PY - 2000

Y1 - 2000

KW - ZX Int.klas.verslagjaar < 2002

M3 - Conference contribution

SP - 1

EP - 4

BT - MME '00

PB - s.n.

CY - S.l.

T2 - Micromechanics Europe, Uppsala

Y2 - 1 October 2000 through 3 October 2000

ER -