Bulk-Micromachined Test Structure for Fast and Reliable Determination of the Lateral Thermal Conductivity of Thin Films

L La Spina, AW van Herwaarden, H Schellevis, WHA Wien, N Nenadovi¿, LK Nanver

Research output: Contribution to journalArticleScientificpeer-review

20 Citations (Scopus)
Original languageUndefined/Unknown
Pages (from-to)675-683
Number of pages9
JournalIEEE Journal of Microelectromechanical Systems
Volume6
Issue number3
Publication statusPublished - 2007

Keywords

  • academic journal papers
  • CWTS JFIS >= 2.00

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