Bulk-Si FinFET Technology for Ultra-High Aspect-Ratio Devices

V Jovanovic, LK Nanver, T Suligoj, M Poljak

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

3 Citations (Scopus)
Original languageUndefined/Unknown
Title of host publicationProc. of the 39th IEEE European Solid-State Device Research Conference (ESSDERC 2009)
EditorsD Tsoukalas, A Dimoulas
Place of PublicationAthens, Greece
PublisherIEEE Society
Pages241-244
Number of pages4
Publication statusPublished - 2009
Event39th IEEE European Solid-State Device Research Conference (ESSDERC 2009) - Athens, Greece
Duration: 14 Sep 200918 Sep 2009

Publication series

Name
PublisherIEEE

Conference

Conference39th IEEE European Solid-State Device Research Conference (ESSDERC 2009)
Period14/09/0918/09/09

Keywords

  • Conf.proc. > 3 pag

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