Buried oxide and defects in oxygen implanted Si monitored by positron annihilation

AC Kruseman, A van Veen, H Schut, PE Mijnarends, M Fujinami

Research output: Contribution to journal › Article › Scientific › peer-review

Keywords

@article{72f92c64667644a2b8c07926c3690c52,

title = "Buried oxide and defects in oxygen implanted Si monitored by positron annihilation",

keywords = "ZX Int.klas.verslagjaar < 2002",

author = "AC Kruseman and {van Veen}, A and H Schut and PE Mijnarends and M Fujinami",

year = "2001",

language = "Undefined/Unknown",

pages = "1179--1187",

journal = "Journal of Applied Physics",

issn = "0021-8979",

publisher = "AIP Publishing",

number = "90",

}