Buried oxide and defects in oxygen implanted Si monitored by positron annihilation

AC Kruseman, A van Veen, H Schut, PE Mijnarends, M Fujinami

    Research output: Contribution to journalArticlepeer-review

    19 Citations (Scopus)
    Original languageUndefined/Unknown
    Pages (from-to)1179-1187
    Number of pages9
    JournalJournal of Applied Physics
    Issue number90
    Publication statusPublished - 2001


    • ZX Int.klas.verslagjaar < 2002

    Cite this