Buried silicon dioxide formation in a precursor nanocavity layer in Si

A van Veen, A Rivera, H Schut, H van Gog

    Research output: Contribution to journalArticleScientificpeer-review

    9 Citations (Scopus)
    Original languageUndefined/Unknown
    Pages (from-to)264-268
    Number of pages5
    JournalNuclear Instruments & Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms
    Volume216
    Publication statusPublished - 2004

    Keywords

    • ZX CWTS JFIS < 1.00

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