Buried silicon dioxide formation in a precursor nanocavity layer in Si

A van Veen, A Rivera, H Schut, H van Gog

Research output: Contribution to journal › Article › Scientific › peer-review

Original language	Undefined/Unknown
Pages (from-to)	264-268
Number of pages	5
Journal	Nuclear Instruments & Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms
Volume	216
Publication status	Published - 2004

Keywords

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title = "Buried silicon dioxide formation in a precursor nanocavity layer in Si",

keywords = "ZX CWTS JFIS < 1.00",

author = "{van Veen}, A and A Rivera and H Schut and {van Gog}, H",

year = "2004",

language = "Undefined/Unknown",

volume = "216",

pages = "264--268",

journal = "Nuclear Instruments & Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms",

issn = "0168-583X",

publisher = "Elsevier",

}

TY - JOUR

T1 - Buried silicon dioxide formation in a precursor nanocavity layer in Si

AU - van Veen, A

AU - Rivera, A

AU - Schut, H

AU - van Gog, H

PY - 2004

Y1 - 2004

KW - ZX CWTS JFIS < 1.00

M3 - Article

SN - 0168-583X

VL - 216

SP - 264

EP - 268

JO - Nuclear Instruments & Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms

JF - Nuclear Instruments & Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms

ER -