c-Si TFTs fabricated with Micro-Czochralski processed grains and ECR-CVD gate oxide

Research output: Book/ReportReportProfessional

Original languageUndefined/Unknown
Place of PublicationDelft
PublisherDelft University of Technology
Number of pages11
VolumeProgress Report 1
Publication statusPublished - 2002

Publication series

Name
PublisherDelft University of Tchnology

Keywords

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