C-V Characterization of MOS capacitators on high resistivity silicon substrate

B Rong, LK Nanver, JN Burghartz, ABM Jansman, B Rejaei Salmassi, AGR Evans

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientific

28 Citations (Scopus)
Original languageUndefined/Unknown
Title of host publicationProceedings of ESSCIRC-ESSDERC 2003
Editors s.n.
Place of Publications.l.
PublisherFrontier/Seguier Atlantica
Pages1-4
Number of pages4
Publication statusPublished - 2003
EventEuropean Solid-State Devices Research Conference, Lisboa/Estoril, Portugal - s.l.
Duration: 15 Sep 200319 Sep 2003

Publication series

Name
PublisherFrontier/Seguier Atlantica

Conference

ConferenceEuropean Solid-State Devices Research Conference, Lisboa/Estoril, Portugal
Period15/09/0319/09/03

Keywords

  • Conf.proc. > 3 pag

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