C-V profiling of ultra-shallow junctions using step-like background profiles

M Popadic, V Milovanovic, C Xu, F Sarubbi, LK Nanver

Research output: Contribution to journalArticleScientificpeer-review

Original languageEnglish
Pages (from-to)890-896
Number of pages7
JournalSolid-State Electronics
Volume54
Issue number9
DOIs
Publication statusPublished - 2010

Keywords

  • CWTS JFIS < 0.75

Cite this