Calibration of phase lamellae by interferometry at 13 nm.

P Pichon, D Joyeux, D Phalippou, M Singh, JJM Braat, M Haild, U Dinger

Research output: Contribution to journal › Article › Scientific › peer-review

Original language	Undefined/Unknown
Pages (from-to)	25-26
Number of pages	2
Journal	The European Physical Journal. Special Topics
Volume	11
Publication status	Published - 2001

Keywords

@article{e3f968f60d0f4610bdcbd657672f69d7,

title = "Calibration of phase lamellae by interferometry at 13 nm.",

keywords = "ZX CWTS JFIS < 1.00",

author = "P Pichon and D Joyeux and D Phalippou and M Singh and JJM Braat and M Haild and U Dinger",

year = "2001",

language = "Undefined/Unknown",

volume = "11",

pages = "25--26",

journal = "The European Physical Journal. Special Topics",

issn = "1155-4339",

publisher = "EDP Sciences",

}

TY - JOUR

T1 - Calibration of phase lamellae by interferometry at 13 nm.

AU - Pichon, P

AU - Joyeux, D

AU - Phalippou, D

AU - Singh, M

AU - Braat, JJM

AU - Haild, M

AU - Dinger, U

PY - 2001

Y1 - 2001

KW - ZX CWTS JFIS < 1.00

M3 - Article

SN - 1155-4339

VL - 11

SP - 25

EP - 26

JO - The European Physical Journal. Special Topics

JF - The European Physical Journal. Special Topics

ER -