Capacitive MEMS accelerometers testing mechanism for auto-calibration and long-term diagnostics

LA Rocha, L Mol, E Cretu, RF Wolffenbuttel, J Machado da silva

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientific

Original languageUndefined/Unknown
Title of host publicationProceedings of IMSTW/GTW 2007
Editors s.n.
Place of Publications.l.
Publishers.n.
Pages171-175
Number of pages5
ISBN (Print)978 972 99181 24
Publication statusPublished - 2007
Event13th International mixed signals testing workshop and 3rd International GHZ/Gbps test workshop, Povoa de Varzim, Portugal - s.l.
Duration: 18 Jun 200720 Jun 2007

Publication series

Name
Publishers.n.

Conference

Conference13th International mixed signals testing workshop and 3rd International GHZ/Gbps test workshop, Povoa de Varzim, Portugal
Period18/06/0720/06/07

Keywords

  • Elektrotechniek
  • Techniek
  • professional journal papers
  • Conf.proc. > 3 pag

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