Capacitive RF MEMS switch dielectric charging and reliability: a critical review with recommendations

Research output: Contribution to journalArticleScientificpeer-review

82 Citations (Scopus)
Original languageEnglish
Pages (from-to)1-23
Number of pages23
JournalJournal of Micromechanics and Microengineering
Volume22
Issue number7
Publication statusPublished - 2012

Keywords

  • academic journal papers
  • CWTS 0.75 <= JFIS < 2.00

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