Capacitive RF MEMS switch dielectric charging and reliability: a critical review with recommendations

WM van Spengen

Research output: Contribution to journal › Article › Scientific › peer-review

Original language	English
Pages (from-to)	1-23
Number of pages	23
Journal	Journal of Micromechanics and Microengineering
Volume	22
Issue number	7
Publication status	Published - 2012

Keywords

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title = "Capacitive RF MEMS switch dielectric charging and reliability: a critical review with recommendations",

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