Capacitive sensor system for sub-nanometer displacement measurement

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

Original languageEnglish
Title of host publicationProceedings IEEE Sensors 2011
EditorsE Lewis, T Kenny
Place of PublicationPiscataway, NJ, USA
PublisherIEEE Society
Pages1173-1176
Number of pages4
ISBN (Print)978-1-4244-9290-3
DOIs
Publication statusPublished - 2011
EventIEEE Sensors 2011 Conference - Limerick, Ireland
Duration: 28 Oct 201131 Oct 2011

Publication series

Name
PublisherIEEE

Conference

ConferenceIEEE Sensors 2011 Conference
CountryIreland
CityLimerick
Period28/10/1131/10/11

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