Capping layer on thin Si film for µ-Czochralski process with excimer laser crystallization

V Rana, R Ishihara, Y Hiroshima, D Abe, S Inoue, T Shimoda, JW Metselaar, CIM Beenakker

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

Original languageUndefined/Unknown
Title of host publicationProceedings of the 12th international workshop on active-matrix liquid-crystal displays
EditorsF Funada
Place of Publications.l.
PublisherJapanese Society of Physics
Pages307-310
Number of pages4
Publication statusPublished - 2005
EventAM-LCD'05, The 12th International Workshop on Active-Matrix Liquid-Crystal Displays, Kanazawa, Japan - s.l.
Duration: 6 Jul 20058 Jul 2005

Publication series

Name
PublisherJapanese Society of Physics

Conference

ConferenceAM-LCD'05, The 12th International Workshop on Active-Matrix Liquid-Crystal Displays, Kanazawa, Japan
Period6/07/058/07/05

Keywords

  • conference contrib. refereed
  • Conf.proc. > 3 pag

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