Capping layer on thin Si film for µ-Czochralski process with excimer laser crystallization

V Rana; R Ishihara; Y Hiroshima; D Abe; S Inoue; T Shimoda; JW Metselaar; CIM Beenakker

Capping layer on thin Si film for µ-Czochralski process with excimer laser crystallization

V Rana, R Ishihara, Y Hiroshima, D Abe, S Inoue, T Shimoda, JW Metselaar, CIM Beenakker

Electronic Components, Technology and Materials

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

Original language	Undefined/Unknown
Title of host publication	Proceedings of the 12th international workshop on active-matrix liquid-crystal displays
Editors	F Funada
Place of Publication	s.l.
Publisher	Japanese Society of Physics
Pages	307-310
Number of pages	4
Publication status	Published - 2005
Event	AM-LCD'05, The 12th International Workshop on Active-Matrix Liquid-Crystal Displays, Kanazawa, Japan - s.l. Duration: 6 Jul 2005 → 8 Jul 2005

Publication series

Name
Publisher	Japanese Society of Physics

Conference

Conference	AM-LCD'05, The 12th International Workshop on Active-Matrix Liquid-Crystal Displays, Kanazawa, Japan
Period	6/07/05 → 8/07/05

Bibliographical note

Editors onbekend, WPM

Keywords

conference contrib. refereed
Conf.proc. > 3 pag

Cite this

@inproceedings{1bd0dcdfbd204b44ab78df2ebbbce586,

title = "Capping layer on thin Si film for µ-Czochralski process with excimer laser crystallization",

keywords = "conference contrib. refereed, Conf.proc. > 3 pag",

author = "V Rana and R Ishihara and Y Hiroshima and D Abe and S Inoue and T Shimoda and JW Metselaar and CIM Beenakker",

note = "Editors onbekend, WPM; AM-LCD'05, The 12th International Workshop on Active-Matrix Liquid-Crystal Displays, Kanazawa, Japan ; Conference date: 06-07-2005 Through 08-07-2005",

year = "2005",

language = "Undefined/Unknown",

publisher = "Japanese Society of Physics",

pages = "307--310",

editor = "F Funada",

booktitle = "Proceedings of the 12th international workshop on active-matrix liquid-crystal displays",

}

Rana, V, Ishihara, R, Hiroshima, Y, Abe, D, Inoue, S, Shimoda, T, Metselaar, JW & Beenakker, CIM 2005, Capping layer on thin Si film for µ-Czochralski process with excimer laser crystallization. in F Funada (ed.), Proceedings of the 12th international workshop on active-matrix liquid-crystal displays. Japanese Society of Physics, s.l., pp. 307-310, AM-LCD'05, The 12th International Workshop on Active-Matrix Liquid-Crystal Displays, Kanazawa, Japan, 6/07/05.

Capping layer on thin Si film for µ-Czochralski process with excimer laser crystallization. / Rana, V; Ishihara, R; Hiroshima, Y et al.
Proceedings of the 12th international workshop on active-matrix liquid-crystal displays. ed. / F Funada. s.l.: Japanese Society of Physics, 2005. p. 307-310.

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

TY - GEN

T1 - Capping layer on thin Si film for µ-Czochralski process with excimer laser crystallization

AU - Rana, V

AU - Ishihara, R

AU - Hiroshima, Y

AU - Abe, D

AU - Inoue, S

AU - Shimoda, T

AU - Metselaar, JW

AU - Beenakker, CIM

N1 - Editors onbekend, WPM

PY - 2005

Y1 - 2005

KW - conference contrib. refereed

KW - Conf.proc. > 3 pag

M3 - Conference contribution

SP - 307

EP - 310

BT - Proceedings of the 12th international workshop on active-matrix liquid-crystal displays

A2 - Funada, F

PB - Japanese Society of Physics

CY - s.l.

T2 - AM-LCD'05, The 12th International Workshop on Active-Matrix Liquid-Crystal Displays, Kanazawa, Japan

Y2 - 6 July 2005 through 8 July 2005

ER -