Capping layers for extreme-ultraviolet multilayer interference coatings.

M Singh, JJM Braat

Research output: Contribution to journalArticleScientificpeer-review

22 Citations (Scopus)
Original languageUndefined/Unknown
Pages (from-to)259-261
Number of pages3
JournalOptics Letters
Volume26
Publication statusPublished - 2001

Keywords

  • ZX CWTS 1.00 <= JFIS < 3.00

Cite this