Capping layers for extreme-ultraviolet multilayer interference coatings.

M Singh, JJM Braat

Research output: Contribution to journal › Article › Scientific › peer-review

Keywords

@article{6b03a13f29454715a9c7baf5cc4f56e3,

title = "Capping layers for extreme-ultraviolet multilayer interference coatings.",

keywords = "ZX CWTS 1.00 <= JFIS < 3.00",

author = "M Singh and JJM Braat",

year = "2001",

language = "Undefined/Unknown",

volume = "26",

pages = "259--261",

journal = "Optics Letters",

issn = "0146-9592",

publisher = "The Optical Society",

}